Semiconductor device and method of manufacturing the same

ABSTRACT

The present invention improves the aperture ratio of a pixel of a reflection-type display device or a reflection type display device without increasing the number of masks and without using a blackmask. A pixel electrode ( 167 ) is arranged so as to partially overlap a source wiring ( 137 ) for shielding the gap between pixels from light, and a thin film transistor is arranged so as to partially overlap a gate wiring ( 166 ) for shielding a channel region of the thin film transistor from light, thereby realizing a high pixel aperture ratio.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.14/257,097, filed Apr. 21, 2014, now allowed, which is a continuation ofU.S. application Ser. No. 13/829,922, filed Mar. 14, 2013, now U.S. Pat.No. 8,704,233, which is continuation of U.S. application Ser. No.13/071,759, filed Mar. 25, 2011, now U.S. Pat. No. 8,399,884, which acontinuation of U.S. application Ser. No. 12/498,696, filed Jul. 7,2009, now U.S. Pat. No. 7,915,615, which is a continuation of U.S.application Ser. No. 11/287,187, filed Nov. 28, 2005, now U.S. Pat. No.7,566,903, which is a continuation of U.S. application Ser. No.09/773,543, filed Feb. 2, 2001, now U.S. Pat. No. 7,023,021, whichclaims the benefit of a foreign priority application filed in Japan asSerial No. 2000-044973 on Feb. 22, 2000, all of which are incorporatedby reference.

BACKGROUND OF THE INVENTION

1. Field of the invention

The present invention relates to a semiconductor device having a circuitconstituted by thin film transistors (hereinafter, abbreviated as TFTs)and a method of manufacturing the same. For example, the presentinvention relates to an electro-optical device as is represented by aliquid crystal display panel and an electric appliance including such anelectro-optical device as a component.

In the specification, the term “semiconductor device” genericallyindicates the devices capable of functioning by taking advantage ofsemiconductor properties; an electro-optical devices, a semiconductorcircuit and an electric appliance are all included in the semiconductordevice.

2. Description of the Related Art

A technique for constituting a TFT by using a semiconductor thin film(having a thickness of about several nm to about several hundreds of nm)formed on a substrate having an insulating surface has lately attractedattention. The TFT is widely used for electronic appliances such as anIC and an electro-optical device. Particularly, there is an urgent needto develop the TFT as a switching element for a liquid crystal displaydevice.

Among liquid crystal display devices, an active matrix liquid crystaldisplay device, in which pixel electrodes are arranged in a matrix andTFTs are used as switching elements respectively connected to pixelelectrodes for obtaining a high-quality image, has particularly drawnattention.

The active matrix liquid crystal display device is mainly classifiedinto two known types; a transmission-type and a reflection-type.

Particularly, as compared with the transmission-type liquid crystaldisplay device, the reflection-type liquid crystal display device isadvantageous in small power consumption because a backlight is not usedfor display. For such an advantage, the reflection-type liquid crystaldisplay device is more and more demanded as a direct-view display formobile computers or video cameras. The reflection-type liquid crystaldisplay device makes use of the optical modulation effects of liquidcrystal to select the state where incident light is reflected at thepixel electrode to be output to the outside of the device or the statewhere incident liquid is not output to the outside of the device so asto display a bright region or a dark region. The reflection-type liquidcrystal display device further combines the bright region and the darkregion to display an image. Generally, a pixel electrode in thereflection-type liquid crystal display device is made of a metalmaterial having a high light reflectance such as aluminum, and iselectrically connected to a switching element such as a TFT.

A pixel structure in a conventional reflection-type liquid crystaldisplay device is shown in FIG. 23. In FIG. 23, two wirings, i.e., agate wiring (scanning line) 11 and a capacitor wiring 12, are formedinto a linear shape by patterning. A source wiring (signal line) 14 isalso formed into a linear shape by patterning. The source wiring 14 isarranged in a row direction while the gate wiring 11 is arranged in acolumn direction. Between the source wiring 14 and the gate wiring 11,an interlayer insulating film is provided to insulate these wirings fromeach other. The source wiring 14 and the gate wiring 11 partially crosseach other. This conventional structure is characteristic in that a TFTincluding a semiconductor layer 10 as an active layer is disposed in thevicinity of the intersection of these wirings.

Conventionally, it is known that a pixel electrode 15 is formed betweenthe source wirings 14, simultaneously with the formation of the sourcewiring 14. In the case where such a structure is employed, a regionbetween the source wiring 14 and the pixel electrode 15 is required tobe shielded from light by using a light-shielding film (also referred toas a black matrix) 13.

Moreover, in the conventional structure, a metal film made of chromiumor the like is patterned into a desired shape so as to obtain thelight-shielding film 13. As a result of employing the conventionalmethod, the number of steps and the number of masks for forming thelight-shielding film itself increase. For sufficient light-shield withthe light-shielding film 13, it is necessary to insulate thelight-shielding film 13 and the pixel electrode from each other byproviding an interlayer insulating film therebetween. Similarly with thelight-shielding film, when the number of layers constituting theinterlayer insulating film increases, the number of manufacturing stepscorrespondingly increases, resulting in a rise in manufacturing cost.Furthermore, this increase in the number of layers of the interlayerinsulating film is disadvantageous in preservation of the interlayerinsulation property.

As another conventional structure, a structure, in which an interlayerinsulating film is provided so as to cover the source wiring 11 and thepixel electrode is provided thereon, is known. In the case where such astructure is used, however, the number of layers increases to increasethe number of steps, resulting in a rise in manufacturing cost.

Furthermore, in terms of display performance, the pixel is desired tohave a large amount of a storage capacitor as well as a high apertureratio. A high aperture ratio of each pixel improves a light utilizationefficiency to reduce the power consumption and the size of a displaydevice.

Recently, the pixel size becomes smaller to obtain an image of higherdefinition. The reduction in pixel size increases the area where a TFTand a wiring are to be formed for one pixel, thereby adverselydecreasing a pixel aperture ratio.

Thus, in order to obtain a high aperture ratio of each pixel with thedefined pixel size, it is indispensable to effectively layout circuitcomponents that are necessary for the circuit structure of a pixel.

As describe above, in order to realize a reflection-type liquid crystaldisplay device or a transmission-type liquid crystal display devicehaving a high pixel aperture ratio with the reduced number of masks, acompletely novel pixel structure that does not correspond to anyconventional structure is desired.

The present invention is to satisfy such a need and has a propose ofproviding a liquid crystal display device having a pixel structure of ahigh pixel aperture ratio realized by the present invention withoutincreasing the number of masks and the number of manufacturing steps.

SUMMARY OF THE INVENTION

In order to solve the above-described problems of the conventionaltechnique, the following measures are devised.

The present invention is characteristic of a pixel structure forshielding TFTs and a region between pixels from light without using ablack matrix. The present invention is characterized in that, as one ofthe means of shielding the TFT from light, a gate electrode and a sourcewiring are formed on a first insulating film and that a large part of asemiconductor layer serving as an active layer is covered with a gatewiring formed on a second insulating film that is different from thefirst insulating film. The present invention is characterized in that,as one of the means of shielding the region between pixels from light, apixel electrode is arranged so as to overlap the source wiring.Furthermore, the present invention is also characterized in that, as oneof the means for shielding the TFT from light, a color filter (a redcolor filter or a lamination film of a red color filter and a bluefilter) is disposed as a light-shielding film on a counter substrate soas to overlap the TFTs on an element substrate.

The structure of the present invention disclosed in the presentspecification relates to a semiconductor device comprising:

a semiconductor layer (a first semiconductor layer 172) having a sourceregion, a drain region, and a channel formation region sandwichedbetween the source region and the drain region on an insulating surface;

a first insulating film on the semiconductor layer (the firstsemiconductor layer 172);

an electrode (a first electrode 134 including a gate electrode)overlapping the channel formation region on the first insulating film;

a source wiring on the first insulating film;

a second insulating film covering the electrode (the first electrode 134including the gate electrode) and the source wiring; and

a gate wiring 166 connected to the electrode (the first electrode 134including the gate electrode) on the second insulating film.

Further, the structure of the present invention disclosed in the presentspecification relates to a semiconductor device comprising:

a semiconductor layer (a first semiconductor layer 172) having a sourceregion, a drain region, and a channel formation region sandwichedbetween the source region and the drain region on an insulating surface;

a first insulating film on the semiconductor layer (the firstsemiconductor layer 172);

an electrode (a first electrode including a gate electrode 134)overlapping the channel formation region on the first insulating film;

a source wiring on the first insulating film;

a second insulating film covering the electrode and the source wiring;

a gate wiring connected to the electrode on the second insulating film;

a connection electrode 165 connected to the source wiring and thesemiconductor layer (specifically, a source region or a drain region) onthe second insulating film; and

a pixel electrode 167 connected to the semiconductor layer(specifically, the source region or the drain region) on the secondinsulating film.

Further, in the above-mentioned structure, the pixel electrode isarranged so as to overlap the source wiring, while sandwiching thesecond insulating film therebetween, to thereby shield light (or toreduce light leaking) between the pixel electrode and source wiring.

Further, in the above-mentioned respective structures, the semiconductordevice is characterized in that the semiconductor layer has a regionoverlapping the gate wiring, while sandwiching the first insulating filmtherebetween.

Further, among the above-mentioned semiconductor layers, a region of thesemiconductor layer overlapping the gate wiring while sandwiching thefirst insulating film therebetween, is characterized by including atleast a channel formation region, a region present between the channelformation region and the drain region, or a region present between thechannel formation region and the source region. This region is protectedfrom external light.

In the case of a multi-gate structure in which a plurality of gateelectrodes are present on one semiconductor layer while sandwiching thefirst insulating film therebetween, a plurality of channel formationregions are present on the semiconductor layer. It is desirable toarrange the gate wiring so as to overlap the region present between onechannel formation region and another channel formation region.

Further, the present invention is characterized in that, in order toprevent the number of masks from increasing, the electrode and thesource wiring are formed of the same material on the first insulatingfilm, and in that the pixel electrode, the connection electrode and thegate wiring are formed of the same material on the second insulatingfilm.

Further, in the above-mentioned respective structures, the semiconductordevice is characterized in that the gate wiring is made of a filmcontaining as a main component an element selected from the groupconsisting of poly-Si to which an impurity element for imparting aconductivity is doped, W, WSi_(x), Al, Cu, Ta, Cr and Mo, or alamination film thereof.

Further, in the above-mentioned respective structures, the semiconductordevice is characterized in that the first insulating film for insulatingbetween the first electrode and the semiconductor layer is a gateinsulating film.

Further, in the above-mentioned respective structures, the semiconductordevice is characterized in that the second insulating film forinsulating a source wiring and a gate wiring includes a first insulatinglayer containing silicon as a main component and a second insulatinglayer made of an organic resin material.

Further, in the above-mentioned respective structures, the semiconductordevice is characterized in that one pixel including the pixel electrodeforms a storage capacitor with the semiconductor layer (a secondsemiconductor layer 173) connected to the pixel electrode and theelectrode (a second electrode 135) connected to a gate wiring of anadjacent pixel, using the first insulating film as a dielectric.Further, it is preferable that an impurity element imparting a p-typeconductivity is added to this semiconductor layer (the secondsemiconductor layer 173).

Further, another structure of the present invention relates to asemiconductor device including TFTs, each TFT comprising a semiconductorlayer formed on an insulating surface, an insulating film formed on thesemiconductor layer, and a gate electrode formed on the insulating film,characterized in that the gate electrode includes a first electricallyconductive layer having a tapered end portion as a lower layer and asecond electrically conductive layer having a width smaller than that ofthe first electrically conductive layer as an upper layer, and in thatthe semiconductor layer includes a channel formation region overlappingthe second electrically conductive layer sandwiching the insulating filmtherebetween, a third impurity region formed in contact with the channelformation region, a second impurity region formed in contact with thethird impurity region, and a first impurity region formed in contactwith the second impurity region.

Further, an angle formed between a side slope of the first electricallyconductive layer and the horizontal plane (also referred to as a taperedangle) is smaller than that between a side slope of the secondelectrically conductive layer and the horizontal plane. For convenience,the side slope having a tapered angle is referred to as a tapered shape,and a portion having a tapered shape is referred to as a tapered portionin this specification.

Further, in the above structure, the third impurity region ischaracterized by overlapping the first electrically conductive layer,while sandwiching the insulating film therebetween. The third impurityregion is formed by doping for adding an impurity element to thesemiconductor layer through the first electrically conductive layerhaving a tapered portion on its end and the insulating film. In thedoping, the thicker the thickness of the material layer positioned onthe semiconductor layer becomes, the shallower ions are implanted.Therefore, the concentration of an impurity element to be added to thesemiconductor layer is affected by the thickness of the electricallyconductive layer having a tapered shape, resulting in a change in theconcentration of the impurity element. With the increase in thethickness of the first electrically conductive layer, the concentrationof an impurity in the semiconductor layer decreases. In the same manner,with the decrease in the thickness of the first electrically conductivelayer, the concentration of an impurity in the semiconductor layerincreases.

Further, in the above-mentioned structure, the semiconductor device ischaracterized in that the first impurity region is a source region or adrain region.

Moreover, in the above-mentioned structure, the semiconductor device ischaracterized in that a region of the insulating film overlapping thesecond impurity region includes a tapered portion. The second impurityregion is formed by doping for adding an impurity element to thesemiconductor layer through the insulating film. Therefore, theconcentration of the impurity of the second impurity region is affectedby the tapered portion of the insulating film to change the distributionof the concentration of the impurity of the second impurity region. Withthe increase in the thickness of the insulating film, the concentrationof the impurity in the second impurity region decreases. In the samemanner, with the reduction in the thickness of the insulating film, theconcentration of the impurity in the second impurity region increases.Although the second impurity region is formed by the same doping as thatfor the third impurity region, the concentration of an impurity in thesecond impurity region is higher than that of the third impurity regionbecause the second impurity region does not overlap the firstelectrically conductive layer. The width of the second impurity regionin the longitudinal direction of the channel is as long as that of thethird impurity region, or is greater than that of the third impurityregion.

Furthermore, the above structure is characterized in that the TFT is ann-channel TFT or a p-channel TFT. Further, in the present invention, apixel TFT is formed by using an n-channel TFT. In addition, a drivercircuit including a CMOS circuit using these n-channel TFTs or p-channelTFTs is formed.

Further, the structure of the present invention disclosed in the presentspecification relates to a semiconductor device comprising a pair ofsubstrates and liquid crystal held between the pair of substrates,

characterized in that a pixel portion and a driver circuit are providedon one of the pair of substrates, and

the pixel portion includes:

a semiconductor layer including a source region, a drain region and achannel formation region sandwiched between the source region and thedrain region on an insulating surface;

a first insulating film on the semiconductor layer;

an electrode overlapping the channel formation region on the firstinsulating film;

a source wiring on the first insulating-film;

a second insulating film covering the electrode and the source wiring;

a gate wiring connected to the electrode on the second insulating film;

a connection electrode connected to the source wiring and thesemiconductor layer on the second insulating film; and

a pixel electrode connected to the semiconductor layer on the secondinsulating film, and

in that the other substrate has a light-shielding film in which a redcolor filter and a blue color filter are laminated so as to overlap thefirst semiconductor layer.

Further, in the above-mentioned structure, the semiconductor deviceprovides an IPS-type liquid crystal display device, comprising a commonwiring on the second insulating film, wherein the pixel electrode andthe common wiring are arranged so that an electric field parallel to asurface of the substrate is generated.

Further, in the above-mentioned structure, there is provided areflection-type liquid crystal display device in which the pixelelectrode is made of a film containing Al or Ag as a main component or alamination film thereof.

Further, in the above-mentioned structure, the semiconductor deviceprovides a transmission-type liquid crystal display device in which thepixel electrode is made of a transparent electrically conductive film.

Further, as another feature of the present invention, a semiconductordevice of the present invention is characterized in that, a firstelectrode 134 including a gate electrode and a gate wiring 166 areformed on different insulating films, respectively, and the firstelectrode 134 and a source wiring 137 are formed on a first insulatingfilm, and the gate wiring 166 and a pixel electrode 167 are formed on asecond insulating film which is different from the first insulatingfilm.

Further, in a manufacturing process realizing the above-mentionedstructure, the structure of the present invention relates to a method ofmanufacturing a semiconductor device, characterized by comprising:

a first step of forming a semiconductor layer made of a crystallinesemiconductor film on an insulating surface;

a second step of forming a first insulating film on the semiconductorlayer;

a third step of forming an electrode overlapping the semiconductor layerand a source wiring on the first insulating film;

a fourth step of forming a second insulating film covering the electrodeand the source wiring; and

a fifth step of forming a gate wiring connected to the electrode andoverlapping the semiconductor layer on the second insulating film, aconnection electrode for connecting the semiconductor layer to thesource wiring, and a pixel electrode overlapping the source wiring.

Further, in a manufacturing process realizing the above-mentionedstructure, another structure of the present invention relates to amethod of manufacturing a semiconductor device, characterized bycomprising:

a first step of forming a first semiconductor layer 172 and a secondsemiconductor layer 173, each being made of a crystalline semiconductorfilm, on an insulating surface;

a second step of forming a first insulating film on the first and secondsemiconductor layers;

a third step of forming a first electrode 134 overlapping the firstsemiconductor layer, a second electrode 135 overlapping the secondsemiconductor layer, and a source wiring 137 on the first insulatingfilm;

a fourth step of forming a second insulating film covering the firstelectrode 134 and the second electrode 135 and the source wiring 137;and

a fifth step of forming a gate wiring 166 connected to the firstelectrode 134 and overlapping the first semiconductor layer 172, aconnection electrode 165 for connecting the first semiconductor layerwith the source wiring, and a pixel electrode 167 overlapping the sourcewiring, on the second insulating film.

Further, in the above-mentioned structure, the method is characterizedin that the second semiconductor layer connected to the pixel electrodeoverlaps the second electrode connected to a gate wiring of an adjacentpixel.

BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings:

FIG. 1 is a top view of a pixel portion according to the presentinvention (Embodiment 1);

FIGS. 2A to 2C are diagrams showing a manufacturing process of an activematrix substrate (Embodiment 1);

FIGS. 3A to 3C are diagrams showing the manufacturing process of anactive matrix substrate (Embodiment 1);

FIG. 4 is a diagram showing the manufacturing process of an activematrix substrate (Embodiment 1);

FIG. 5 is a diagram showing a cross-sectional structure of areflection-type liquid crystal display device (Embodiment 2);

FIG. 6 is a top view of a pixel portion according to the presentinvention (Embodiment 1);

FIGS. 7A and 7B are a top view and a cross-sectional view of an activematrix substrate, respectively (Embodiment 3);

FIGS. 8A and 8B are cross-sectional views of a terminal section(Embodiment 3);

FIGS. 9A to 9C diagrams showing cross-sectional structures of atransmission-type liquid crystal display device (Embodiment 4);

FIG. 10 is a cross-sectional view of a terminal section (Embodiment 5);

FIG. 11 is a cross-sectional view of an active matrix substrateaccording to the present invention (Embodiment 6);

FIG. 12 is a cross-sectional view of an active matrix substrateaccording to the present invention (Embodiment 7);

FIG. 13 is a top view of a pixel portion according to the presentinvention (Embodiment 8);

FIG. 14 is a cross-sectional view of the pixel portion according to thepresent invention (Embodiment 8);

FIG. 15 is a top view of a pixel portion according to the presentinvention (Embodiment 10);

FIG. 16 is a cross-sectional view of the pixel portion according to thepresent invention (Embodiment 10);

FIG. 17 is a top view of a pixel portion according to the presentinvention (Embodiment 11);

FIG. 18 is a cross-sectional view of the pixel portion according to thepresent invention (Embodiment 11);

FIG. 19 is a cross-sectional view of a pixel portion according to thepresent invention (Embodiment 12);

FIGS. 20A to 20F are diagrams showing examples of electric appliances(Embodiment 13);

FIGS. 21A to 21D are diagrams showing examples of electric appliances(Embodiment 13);

FIGS. 22A to 22C are diagrams showing examples of electric appliances(Embodiment 13);

FIG. 23 is a diagram showing a conventional example;

FIGS. 24A to 24D are enlarged cross-sectional views showing themanufacturing process of an active matrix substrate; and

FIG. 25 is a top view of a pixel portion (Embodiment 4).

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, embodiments of the present invention will be described withreference to the drawings.

A liquid crystal display device of the present invention includes, as abasic structure, an element substrate and a counter substrate bondedwith each other with a predetermined gap being interposed therebetweenand an electro-optical material (a liquid crystal material or the like)being held in the gap.

A specific example of a pixel structure according to the presentinvention is shown in FIG. 1. Herein, an example of a reflection-typeliquid crystal display device is shown.

The element substrate includes a gate wiring 166 arranged in a rowdirection, a source wiring 137 arranged in a column direction, a pixelportion having a pixel TFT in the vicinity of the intersection of thegate wiring 166 and the source wiring 137; and a driver circuit havingan n-channel TFT or a p-channel TFT.

The gate wiring 166 shown in FIG. 1 is a gate wiring connected to anisland-like first electrode 134 disposed in a row direction. The gatewiring 166 is provided on a second insulating film in contact therewith.Similarly with the source wiring 137, the island-like first electrode134 is formed on a first insulating film (hereinafter, also referred toas a gate insulating film) so as to be in contact therewith.

A connection electrode 165 is formed on the second insulating film(hereinafter, also referred to as an interlayer insulating film) aspixel electrodes 167 and 175 and the gate wiring 166.

Owing to the pixel structure of the present invention, the active layerof the TFT can be placed so as to overlap the gate wiring, therebyshielding the active layer of the TFT from light.

In order to shield the TFT on the electrode substrate from light, atleast a channel formation region of a first semiconductor layer 172 isdisposed so as to be shielded from light by the gate wiring 166. Inaddition to the channel formation region, it is desirable that a regionpresent between the channel formation region and the drain region (suchas an LDD region and an offset region) and a region present between thechannel formation region and the source region are shielded from lightby the gate wiring 166. Since the pixel structure shown in FIG. 1 is amulti-gate structure, a plurality of channel formation regions arepresent in one semiconductor layer. Therefore, a region present betweenone channel formation region and another channel formation region isalso desired to be shielded from light by the gate wiring 166.

The gate wiring 166 is formed on an insulating film in a contactingmanner, which is different from the insulating film on which the firstelectrode 134 serving as a gate electrode is provided. In the pixelstructure shown in FIG. 1, the first electrode 134 not only serves as agate electrode overlapping the first semiconductor, layer through thegate insulating film, but also serves as one of the electrodesconstituting a storage capacitor of adjacent pixels.

With the pixel structure of the present invention, a region betweenpixels is shielded from light mainly by overlapping the end of the pixelelectrode 167 with the source wiring 137.

Gaps such as a gap between the pixel electrode 167 and the connectionelectrode 165 and a gap between the pixel electrode 167 and the gatewiring 166 are shielded from light by a color filter provided on thecounter substrate. As the color filter, a red color filter, a laminationfilm of a red color filter and a blue color filter, or a lamination filmof a red color filter, a blue color filter and a green color filter,which is patterned to be at a predetermined position (at the position ofthe TFT on the element substrate), is provided on the counter substrate.

With such a structure, the TFT on the element substrate is shielded fromlight mainly by the gate wiring 166. Furthermore, the gaps betweenpixels can be shielded from light by the color filter (a red colorfilter, a lamination film of a red color filter and a blue color filter,or a lamination film of a red color filter, a blue color filter and agreen color filter) provided on the counter substrate.

A storage capacitor of the pixel electrode 167 is constituted by asecond semiconductor layer 173 connected to the pixel electrode 167 anda second electrode 135, using an insulating film covering the secondsemiconductor layer 173 as a dielectric. An impurity element forimparting a p-type conductivity is added to a part of the secondsemiconductor layer 173. As a result of addition of the impurityelement, when a voltage is applied to the second electrode 135, achannel formation region is formed to form a storage capacitor.Furthermore, in a region where the second electrode 135 overlaps thepixel electrode 167, a storage capacitor using the interlayer insulatingfilms 157 and 158 as dielectrics is formed. Although a storage capacitoris herein formed by using the second electrode 135, the storagecapacitor is not particularly limited thereto; a pixel structure inwhich a capacitor wiring or a capacitor electrode is provided mayalternatively be employed.

The number of masks required to form the element substrate including thepixel portions having the pixel structure shown in FIG. 1 and drivercircuits may be set to five. Specifically, the first mask is forpatterning the first semiconductor layer 172 and the secondsemiconductor layer 173; the second mask is for patterning the firstelectrode 134, the second electrode 135, and the source wiring 137; thethird is a mask for covering an n-channel TFT when an impurity elementfor imparting a p-type conductivity is added so as to form a p-channelTFT and a storage capacitor of the driver circuit; the fourth mask isfor forming contact holes reaching the first semiconductor layer, thesecond semiconductor layer, the first electrode and the secondelectrode; and the fifth is a mask for patterning the connectionelectrodes 165 and 205, the gate wiring 166 and the pixel electrodes 167and 175.

As described above, in the case where the pixel structure shown in FIG.1 is employed, a reflection-type liquid crystal display device having ahigh pixel aperture ratio (about 78%) can be realized with the reducednumber of masks.

An additional mask is needed if a light-transmitting electricallyconductive film is used as a pixel electrode so as to be patterned intoa desired shape. However, a transmission-type liquid crystal displaydevice can be manufactured thereby. Also in the case where atransmission-type liquid crystal display device is to be manufactured, apixel aperture ratio of about 56% can be obtained with the reducednumber of masks.

A common wiring and a pixel electrode are arranged so as to generate anelectric field parallel to the surface of the substrate, therebymanufacturing a transmission-type liquid crystal display device of theIPS system.

The present invention with the above-described structure will bedescribed in further detail by the following embodiments.

[Embodiment 1]

A method of manufacturing a pixel portion and TFTs (an n-channel TFT anda p-channel TFT) of a driver circuit formed in the periphery of thepixel portion, at the same time and on the same substrate is explainedin detail in Embodiment 1.

First, as shown in FIG. 2A, a base film 101 made of an insulating filmsuch as a silicon oxide film, a silicon nitride film, or a siliconoxynitride film, is formed on a substrate 100 made from a glass such asbarium borosilicate glass or aluminum borosilicate glass, typically aglass such as Corning Corp. #7059 glass or #1737 glass. For example, alamination film of a silicon oxynitride film 101 a, manufactured fromSiH₄, NH₃, and N₂O by plasma CVD, and formed having a thickness of 10 to200 nm (preferably between 50 and 100 nm), and a hydrogenated siliconoxynitride film 101 b, similarly manufactured from SiH₄ and N₂O, andformed having a thickness of 50 to 200 nm (preferably between 100 and150 nm), is formed. A two layer structure is shown for the base film 101in Embodiment 1, but a single layer film of an insulating film, and astructure in which more than two layers are laminated, may also beformed.

Island shape semiconductor layers 102 to 106 are formed by crystallinesemiconductor films manufactured from a semiconductor film having anamorphous structure, using a laser crystallization method or a knownthermal crystallization method. The thickness of the island shapesemiconductor layers 102 to 106 may be formed from 25 to 80 nm(preferably between 30 and 60 nm). There are no limitations placed onthe crystalline semiconductor film material, but it is preferable toform the crystalline semiconductor films by silicon or a silicongermanium (SiGe) alloy,

A laser such as a pulse emission type or continuous emission typeexcimer laser, a YAG laser, or a YVO₄ laser can be used as a laser lightsource used in manufacturing the crystalline semiconductor films by thelaser crystallization method. A method of condensing laser light emittedfrom a laser emission device into a linear shape by an optical systemand then irradiating the light to the semiconductor film may be usedwhen these types of lasers are used. The crystallization conditions maybe suitably selected by the operator, but when using the excimer laser,the pulse emission frequency is set to 30 Hz, and the laser energydensity is set from 100 to 400 mJ/cm² (typically between 200 and 300mJ/cm²). Further, when using the YAG laser, the second harmonic is usedand the pulse emission frequency is set from 1 to 10 kHz, and the laserenergy density may be set from 300 to 600 mJ/cm² (typically between 350and 500 mJ/cm²). The laser light condensed into a linear shape with awidth of 100 to 1000 μm, for example 400 μm, is then irradiated over theentire surface of the substrate. This is performed with an overlap ratioof 80 to 98% for the linear laser light.

A gate insulating film 107 is formed covering the island shapesemiconductor layers 102 to 106. The gate insulating film 107 is formedof an insulating film containing silicon with a thickness of 40 to 150nm by plasma CVD or sputtering. A 120 nm thick silicon oxynitride filmis formed in Embodiment 1. The gate insulating film is not limited tothis type of silicon oxynitride film, of course, and other insulatingfilms containing silicon may also be used in a single layer or in alamination structure. For example, when using a silicon oxide film, itcan be formed by plasma CVD with a mixture of TEOS (tetraethylorthosilicate) and O₂, at a reaction pressure of 40 Pa, with thesubstrate temperature set from 300 to 400° C., and by discharging at ahigh frequency (13.56 MHz) electric power density of 0.5 to 0.8 W/cm².Good characteristics as a gate insulating film can be obtained bysubsequently performing thermal annealing, at between 400 and 500° C.,of the silicon oxide film thus manufactured.

A first conductive film 108 and a second conductive film 109 are thenformed on the gate insulating film 107 in order to form gate electrodes.The first conductive film 108 is formed of a Ta film with a thickness of50 to 100 nm, and the second conductive film is formed of a W filmhaving a thickness of 100 to 300 nm, in Embodiment 1.

The TaN film is formed by sputtering, and sputtering of a Ta target isperformed in a nitrogen atmosphere. The W film is formed by sputteringwith a W target, which can also be formed by thermal CVD using tungstenhexafluoride (WF₆). Whichever is used, it is necessary to make thefilm-become low resistance in order to use it as the gate electrode, andit is preferable that the resistivity of the W film be made equal to orless than 20 μΩcm. The resistivity can be lowered by enlarging thecrystals of the W film, but for cases in which there are many impurityelements such as oxygen within the W film, crystallization is inhibited,and the film becomes high resistance. A W target having a purity of99.9999% or 99.99% is thus used in sputtering. In addition, by formingthe W film while taking sufficient care that no impurities from the gasphase are introduced at the time of film formation, the resistivity of 9to 20 μΩcm can be achieved.

Note that, although the first conductive film 108 is a Ta film and thesecond conductive film is a W film in Embodiment 1, the conductive filmsare not limited to these. Both may also be formed from an elementselected from the group consisting of Ta, W, Ti, Mo, Al, and Cu, from analloy material having one of these elements as its main constituent, orfrom a chemical compound of these elements. Further, a semiconductorfilm, typically a poly-silicon film into which an impurity element suchas phosphorous is doped, may also be used. Examples of preferablecombinations other than that used in Embodiment 1 include: forming thefirst conductive film by tantalum nitride (TaN) and combining it withthe second conductive film formed from a W film; forming the firstconductive film by tantalum nitride (TaN) and combining it with thesecond conductive film formed from an Al film; and forming the firstconductive film by tantalum nitride (TaN) and combining it with thesecond conductive film formed from a Cu film.

Masks 110 to 116 are formed next from resist, and a first etchingprocess is performed in order to form electrodes and wirings. An ICP(inductively coupled plasma) etching method is used in Embodiment 1. Agas mixture of CF₄ and Cl₂ is used as an etching gas, and a plasma isgenerated by applying a 500 W RF electric power (13.56 MHz) to a coilshape electrode at 1 Pa. A 100 W RF electric power (13.56 MHz) is alsoapplied to the substrate side (test piece stage), effectively applying anegative self-bias voltage. In case of mixing CF₄ and Cl₂, the W filmand the TaN film are etched to the approximately same level.

Edge portions of the first conductive layer and the second conductivelayer are made into a tapered shape in accordance with the effect of thebias voltage applied to the substrate side under the above etchingconditions by using a suitable resist mask shape. The angle of thetapered portions is from 15 to 45°. The etching time may be increased byapproximately 10 to 20% in order to perform etching without any residueremaining on the gate insulating film. The selectivity of a siliconoxynitride film with respect to a W film is from 2 to 4 (typically 3),and therefore approximately 20 to 50 nm of the exposed surface of thesilicon oxynitride film is etched by this over-etching process. Firstshape conductive layers 118 to 124 (first conductive layers 118 a to 124a and second conductive layers 118 b to 124 b) are thus formed of thefirst conductive layers and the second conductive layers in accordancewith the first etching process. Reference numeral 117 denotes a gateinsulating film, and the regions of the gate insulating film 117 notcovered by the first shape conductive layers 118 to 124 are made thinnerby etching of 20 to 50 nm.

Further, the first shape conductive layers 118 to 124 are formed byetching one time in Embodiment 1, but they may also be formed by aplurality of etchings.

A first doping process is then performed, and an impurity element whichimparts n-type conductivity is added. (See FIG. 2B.) Ion doping or ioninjection may be performed for the method of doping. Ion doping isperformed under the conditions of a dose amount of from 1×10¹³ to 5×10¹⁴atoms/cm² and an acceleration voltage of 60 to 100 keV. A periodic tablegroup 15 element, typically phosphorous (P) or arsenic (As) is used asthe impurity element which imparts n-type conductivity, and phosphorous(P) is used here. The conductive layers 118 to 122 become masks withrespect to the n-type conductivity imparting impurity element in thiscase, and first impurity regions 125 to 129 are formed in aself-aligning manner. The impurity element which imparts n-typeconductivity is added to the first impurity regions 125 to 129 with aconcentration in the range of 1×10²⁰ to 1×10²¹ atoms/cm³.

A second etching process is performed next, as shown in FIG. 2C. The ICPetching method is similarly used, a mixture of CF₄, Cl₂, and O₂ is usedas the etching gas, and a plasma is generated by supplying a 500 W RFelectric power (13.56 MHz) to a coil shape electrode at a pressure of 1Pa. A 50 W RF electric power (13.56 MHz) is applied to the substrateside (test piece stage), and a self-bias voltage which is lower incomparison to that of the first etching process is applied. The W filmis etched anisotropically under these etching conditions, and Ta (thefirst conductive layers) is anisotropically etched at a slower etchingspeed, forming second shape conductive layers 131 to 137 (firstconductive layers 131 a to 137 a and second conductive layers 131 b to137 b). Reference numeral 130 denotes a gate insulating film, andregions not covered by the second shape conductive layers 131 to 137 areadditionally etched on the order of 20 to 50 nm, forming thinnerregions.

Further, the second shape conductive layers 131 to 137 shown in FIG. 2Care formed by etching one time in Embodiment 1, but they may also beformed by etching twice or more. For example, after performing etchingwith a gas mixture of CF₄ and Cl₂, etching may then be performed using agas mixture of CF₄, Cl₂ and O₂.

The etching reaction of a W film or a TaN film in accordance with amixed gas of CF₄ and Cl₂ can be estimated from the radicals generatedand from the ion types and vapor pressures of the reaction products.Comparing the vapor pressures of fluorides and chlorides of W and Ta,the W fluoride compound WF₆ is extremely high, and the vapor pressuresof WCl₅, TaF₅, and TaCl₅ are of similar order. Therefore the W film andthe Ta film are both etched by the CF₄ and Cl₂ gas mixture. However, ifa suitable quantity of O₂ is added to this gas mixture, CF₄ and O₂react, forming CO and F, and a large amount of F radicals or F ions isgenerated. As a result, the etching speed of the W film having a highfluoride vapor pressure is increased. On the other hand, even if Fincreases, the etching speed of Ta does not relatively increase.Further, TaN is easily oxidized compared to W, and therefore the surfaceof TaN is oxidized by the addition of O₂. The etching speed of the TaNfilm is further reduced because TaN oxides do not react with fluorineand chlorine. It therefore becomes possible to have a difference inetching speeds between the W film and the TaN film, and it becomespossible to make the etching speed of the W film larger than that of theTaN film.

A second doping process is then performed, as shown in FIG. 3A. The doseamount is made smaller than that of the first doping process in thiscase, and an impurity element which imparts n-type conductivity is dopedunder high acceleration voltage conditions. For example, doping isperformed with the acceleration voltage set from 70 to 120 keV, and adose amount of 1×10¹³ atoms/cm³, and a new impurity region is formedinside the first impurity region formed in the island shapesemiconductor layers of FIG. 2B. The second conductive layers 131 b to135 b are used as masks with respect to the impurity element, and dopingis performed so as to also add the impurity element into regions underthe first conductive layers 131 a to 135 a. Third impurity regions 143to 147 that overlap the first conductive layers 131 a to 135 a, andsecond impurity regions 143 to 147 between the first impurity regionsand the third impurity regions are thus formed. The impurity elementwhich imparts n-type conductivity is added such that the concentrationbecomes from 1×10¹⁷ to 1×10¹⁹ atoms/cm³ in the second impurity regions,and becomes from 1×10¹⁶ to 1×10¹⁸ atoms/cm³ in the third impurityregions.

Further, an example is shown here of performing the second dopingprocess with the resist masks as is, but the second doping process mayalso be performed after removing the resist masks.

Fourth impurity regions 151 to 156 added with an impurity element havinga conductivity type which is the opposite of the above single conductivetype impurity element, are then formed as shown in FIG. 3B in the islandshape semiconductor layers 104 which form p-channel TFTs. The secondconductive layers 132 and 135 are used as a mask with respect to theimpurity element, and the impurity regions are formed in a self-aligningmanner. The island shape semiconductor layers 103, 105, and 106, whichform n-channel TFTs, are covered over their entire surface areas byresist masks 148 to 150. Phosphorous is added in differing concentrationto the impurity regions 151 to 156, and ion doping is performed hereusing diborane (B₂H₆), so that boron is also added to the fourthimpurity regions 151 to 156 with a concentration of 2×10²⁰ to 2×10²¹atoms/cm³. In practice, the boron contained in the fourth impurityregions is influenced by the film thickness of the conductive layerswhich have a tapered shape and the insulating film in positions abovethe semiconductor layers, similar to the second doping process, and theconcentration of the impurity element added into the fourth impurityregions also changes.

Impurity regions are formed in the respective island shape semiconductorlayers by the above processes. The second conductive layers 131 to 134overlapping the island shape semiconductor layers function as gateelectrodes. Further, reference numeral 137 denotes the regionsfunctioning as the island shape source wirings, reference numeral 134denotes the regions functioning as the gate wirings, and referencenumeral 135 denotes the regions functioning as the capacitor wirings.

A process of activating the impurity elements added to the respectiveisland shape semiconductor layers is then performed, as shown in FIG.3C, with the aim of controlling conductivity type. Thermal annealingusing an annealing furnace is performed for this process. In addition,laser annealing and rapid thermal annealing (RTA) can also be applied.Thermal annealing is performed with an oxygen concentration equal to orless than 1 ppm, preferably equal to or less than 0.1 ppm, in a nitrogenatmosphere at 400 to 700° C., typically between 500 and 550° C. Heattreatment is performed for 4 hours at 500° C. in Embodiment 1. However,for cases in which the wiring material used in the wirings 131 to 137 isweak with respect to heat, it is preferable to perform activation afterforming an interlayer insulating film (having silicon as its mainconstituent) in order to protect the wirings and the like.

The top view of the pixel portion after the activation step is shown inFIG. 6. The portions which correspond to FIG. 1 to FIG. 5 are indicatedby same marks. The line of C-C′ in FIG. 3 correspond to the crosssectional view cut the line C-C′ in FIG. 6. The line of D-D′ in FIG. 3correspond to the spherical view cut the line of D-D′ in FIG. 6.

In addition, heat treatment is performed for 1 to 12 hours at 300 to450° C. in an atmosphere containing between 3 and 100% hydrogen,performing hydrogenation of the island shape semiconductor layers. Thisprocess is one of terminating dangling bonds in the island shapesemiconductor layers by hydrogen which is thermally excited. Plasmahydrogenation (using hydrogen excited by a plasma) may also be performedas another means of hydrogenation.

When the case of using a laser annealing method as a activation process,the laser light such as an YAG laser can be irradiated after forming theprotective film from silicon oxinitride film and performing the abovementioned hydrogenation.

A first interlayer insulating film 157 is formed next of a siliconoxynitride film having a thickness of 100 to 200 nm. A second interlayerinsulating film 158 made of an organic insulating material is thenformed on the first interlayer insulating film 157. Etching is thenperformed in order to form contact holes.

Source wirings 159 to 161 for forming contacts with source regions, anddrain wirings 162 to 164 for forming contacts with drain regions, of theisland shape semiconductor layers in a driver circuit 406 are thenformed. Further, in a pixel portion 407, pixel electrodes 167, the gatewiring 166 and a connection electrode 165 are formed. (See FIG. 4) Anelectrical connection is made, in accordance with the connection wiring165, between the island shape source wiring 137 and a pixel TFT 404. Anelectrical connection is also made between the gate wiring 166 and thefirst electrode. The pixel electrode 167 forms electrical connectionswith the island shape semiconductor layer corresponding to the activelayer of the pixel TFT (corresponding to the first semiconductor layer172 in FIG. 1) and the island shape semiconductor layer forming astorage capacitor (corresponding to the second semiconductor layer 173in FIG. 1). Note that the pixel electrode 167 is shared between adjacentpixels.

The driver circuit 406 having an n-channel TFT 401, a p-channel TFT 402,and an n-channel TFT 403; and the pixel portion 407 having the pixel TFT404 and a storage capacitor 405 can thus be formed on the samesubstrate. For convenience, this type of substrate is referred to as anactive matrix substrate throughout this specification.

The n-channel TFT 401 of the driver circuit 406 has: a channel formingregion 168; the third impurity region 143 overlapping the secondconductive layer 131, which forms a gate electrode, (GOLD(Gate-Overlapped-LDD) region); the second impurity region 141 formedoutside the gate electrode (LDD (Lightly-Doped-Drain) region); and thefirst impurity region 125 which functions as a source region or a drainregion. The p-channel TFT 402 has: a channel forming region 169; thefourth impurity region 153 overlapping the second conductive layer 132,which forms a gate electrode; the fourth impurity region 152 formedoutside the gate electrode; and the fourth impurity region 151 whichfunctions as a source region or a drain region. The n-channel TFT 403has: a channel forming region 170; the third impurity region 145overlapping the second conductive layer 133, which forms a gateelectrode, (GOLD region); the second impurity region 140 formed outsidethe gate electrode (LDD region); and the first impurity region 127 whichfunctions as a source region or a drain region.

The pixel TFT 404 of the pixel portion has: a channel forming region171; the third impurity region 146 overlapping the second conductivelayer 139, which forms a gate electrode, (GOLD region); the secondimpurity region 141 formed outside the gate electrode (LDD region); andthe first impurity region 128 which functions as a source region or adrain region. Further, an impurity element which imparts n-typeconductivity is added: to the semiconductor layer which functions as oneelectrode of the storage capacitor 405, at the same concentration as inthe forth impurity regions. The storage capacitor 405 is formed by thesecond electrode 135 and an insulating layer therebetween (the samelayer as the gate insulating film). Further, an impurity element whichimparts p-type conductivity is added in the semiconductor film 106because the second electrode 135, which is an electrode of the storagecapacitor 405, also functions as a gate electrode of adjacent pixel thinfilm transistor. Similarly, the first electrode 134 functions as a gateelectrode for the pixel electrode 167 and also functions as an electrodeof a storage capacitor for the pixel electrode 175. This feature issuitable for a small storage capacitor which is required in a displaypanel such as 4 inches or less in diagonal. Also, it should be notedthat a pixel structure as shown in FIG. 13 is suitable for a large sizedisplay panel.

A top view of the pixel portion of the active matrix substratemanufactured by Embodiment 1 is shown in FIG. 1. The portion whichcorrespond to the FIG. 2A to FIG. 6. The line A-A′ of FIG. 1 correspondsto the Line A-A′ shown in FIG. 4. The line B-B′ of FIG. 1 corresponds tothe Line B-B′ shown in FIG. 6.

Consequently, with the active matrix substrate having the pixelelectrode of the present invention, the first electrode 134 a part ofwhich is functioning the gate electrode and the gate wiring 166 areformed in different layers so as to shield from the light thesemiconductor film by the gate wiring 166.

Further, with the pixel structure of the present invention, sourcewirings is arranged so as to overlap in edge portions of the pixelelectrodes such that the gaps between the pixel electrodes can beshielded from light without using a black matrix.

Above mentioned pixel structure can make it possible that pixelelectrode having large area can be disposed so as to improve theaperture ratio.

Furthermore, in accordance with the processes shown in Embodiment 1, theactive matrix substrate can be manufactured by using five photomasks (anisland shape semiconductor layer pattern, a first wiring pattern(including the first electrode 134, the second electrode 135, and thesource wiring 137), a source and a drain regions of p-channel TFTpattern, a contact hole pattern, and a second wiring pattern (includingpixel electrodes 167, connection electrodes 165 and the gate wirings166). As a result, the processes can be reduced, and this contributes toa reduction in the manufacturing costs and an increase in throughput.

Moreover, although the example where the gate electrode and the sourcewiring are simultaneously formed is given in this embodiment, anothermask may be additionally formed and the gate electrode and the firstelectrode may be separately formed in different manufacturing steps.Specifically, a portion overlapping the semiconductor layer which is toserve as a gate electrode is first formed. After successively adding ann-type or a p-type impurity element to the portion serving as gateelectrode and activating this portion, the first electrode is formed soas to overlap the gate electrode. At this point, a contact between thegate electrode and the first electrode is formed not by forming acontact hole but merely by superposing the first electrode on the gateelectrode. Moreover, the source wiring is formed simultaneously with thefirst electrode. This allows the utilization of aluminum or copperhaving a low resistance as a material of the first electrode and thesource wiring.

[Embodiment 2]

A process of manufacturing an active matrix liquid crystal displaydevice from the active matrix substrate manufactured in Embodiment 1 isexplained below in Embodiment 2. FIG. 5 is used for the explanation.

After first obtaining the active matrix substrate of FIG. 4 inaccordance with Embodiment 1, an orientation film 567 is formed on theactive matrix substrate of FIG. 4, and a rubbing process is performed.

An opposing substrate 569 is prepared. Color filter layers 570 and 571,and an overcoat layer 573 are formed on the opposing substrate 569. Thecolor filter layers are formed such that the color filter layer 570,having a red color, and the color filter 571, having a blue color, areoverlapped with each other, and also serve as a light shielding film. Itis necessary to shield at least the spaces between the TFTs; and theconnection electrodes and the pixel electrodes when using the substrateof Embodiment 1, and therefore, it is preferable that the red colorfilters and the blue color filters are arranged so as to overlap andshield the necessary positions.

Further, combined with the connection electrode 165, the red colorfilter layer 570, the blue color filter layer 571, and a green colorfilter layer 572 are overlaid, forming a spacer. Each color filter isformed having a thickness of 1 to 3 μm by mixing a pigment into anacrylic resin. A predetermined pattern can be formed using a mask whichuses a photosensitive material. Considering the thickness of theovercoat layer of 1 to 4 μm, the height of the spacers can be made from2 to 7 μm, preferably between 4 and 6 μm. A gap is formed by this heightwhen the active matrix substrate and the opposing substrate are joinedtogether. The overcoat layer is formed by an optical hardening, or athermosetting, organic resin material, and materials such as polyimideand acrylic resin are used, for example.

The arrangement of the spacers may be determined arbitrarily, and thespacers may be arranged on the opposing substrate so as to line up withpositions over the connection electrodes, as shown in FIG. 5, forexample. Further, the spacers may also be arranged on the opposingsubstrate so as to line up with positions over the TFTs of the drivercircuit. The spacers may be arranged over the entire surface of thedriver circuit portion, and they may be arranged so as to cover sourcewirings and drain wirings.

An opposing electrode 576 is formed by patterning after forming theovercoat layer 573, and a rubbing process is performed after forming anorientation film 574.

The active matrix substrate on which the pixel portion and the drivercircuit are formed, and the opposing substrate are then joined togetherby a sealant 568. A filler is mixed into the sealant 568, and the twosubstrates are joined together with a uniform gap maintained by thefiller and the spacers. A liquid crystal material 575 is then injectedbetween both the substrate, and this is completely sealed by using asealing material (not shown in the figure). A known liquid crystalmaterial may be used as the liquid crystal material. The active matrixliquid crystal display device shown in FIG. 5 is thus completed.

[Embodiment 3]

The structure of the active matrix liquid crystal display device (FIG.5) obtained by using Embodiment 2 will be described with reference tothe top view of FIG. 7A. The components corresponding to those in FIG. 5are designated by the same reference numerals.

In the top view shown in FIG. 7A, the pixel portion, the driver circuit,an external input terminal 203 to which an FPC (Flexible PrintedCircuit) is bonded, a wiring 204 for connecting the external inputterminal 203 with input sections of the respective circuits, and thelike are formed on an active matrix substrate 201. The active matrixsubstrate 201 and an opposing substrate 569, on which a color filter andthe like are formed, are bonded with each other, sandwiching anend-sealing material 568 therebetween.

A light-shielding film 207 made of a red color filter or a laminationfilm of a red color filter and a blue color filter is formed on theupper surfaces of a gate wiring side driver circuit 205 and a sourcewiring side driver circuit 206 that face the counter substrate. A colorfilter 208 formed on the surface of the pixel portion 407 facing thecounter substrate is provided so that each of red (R), green (G) andblue (B) color filters corresponds to each pixel. For practical display,color display is realized by color filters of three colors, i.e., a redcolor filter, a green color filter and a blue color filter. Thearrangement of color filters of these three colors is arbitrary.

FIG. 8A shows a cross sectional view of the external input terminal 203shown in FIG. 7A taken along the line of F-F′. The external terminal 203is formed on the side of the active matrix substrate, and is connectedto a wiring 211 formed of the same-layer as that of the gate wiring bythe wiring 209 formed of the same layer as the pixel electrode forreducing an interlayer capacitor and a wiring resistance to prevent thedefects due to breaking of the wiring from occurring, sandwiching theinterlayer insulating film 158 therebetween.

The FPC including a base film 212 and a wiring 213 is bonded with theexternal input terminal by an anisotropic electrically conductive resin214. Furthermore, mechanical strength is enhanced by a reinforcing plate215.

FIG. 8B shows the external input terminal 203 in detail, which is across-sectional view of the external terminal-section shown in FIG. 8A.The external input terminal 203 provided on the side of the activematrix substrate includes the wiring 211 formed of the same layer asthat of the first electrode and the source wiring and the wiring 209formed of the same layer as that of the pixel electrode. It is apparentthat it is merely an example showing the structure of the terminalsection and that the external terminal section may be constituted byeither the wiring 211 or the wiring 209. For example, in the case wherethe external terminal section is constituted by the wiring 211 formed ofthe same layer as the first electrode and the source wiring, theinterlayer insulating film overlaying the wiring 211 is required to beremoved. The wiring 209 made of the same layer as that of the pixelelectrode has a triple-layered structure of a Ti film 209 a, an Al film209 b and a Sn film 209 c. The FPC is formed by the base film 212 andthe wiring 213. This wiring 213 and the wiring 209 formed of the samelayer as that of the pixel electrode are bonded with each other by ananisotropic electrically conductive adhesive consisting of athermosetting adhesive 214 and electrically conductive particles 216dispersed therein, thereby forming an electrical connection structure.

On the other hand, FIG. 7B is a cross-sectional view of the externalinput terminal 203 shown in FIG. 7A, taken along the line of E-E′. Anouter diameter of the electrically conductive particle 216 is smallerthan a pitch of the wiring 209. Accordingly, assuming that the amount ofthe electrically conductive particles 216 dispersed in the adhesive 214is appropriate, electrical connection with the corresponding wiring onthe side of the FPC can be formed without causing short-circuiting withan adjacent wiring.

The active matrix liquid crystal display device manufactured asdescribed above can be used as a display region of various electronicappliances.

[Embodiment 4]

The active matrix substrate manufactured in Embodiment 1 can be appliedto a reflection-type display device without any further manufacturingprocess. On the other hand, in the case where a transmission-type liquidcrystal display device is to be manufactured, a pixel electrode providedfor each pixel of the pixel portion may be formed of a transparentelectrode. In this embodiment, a method of manufacturing an activematrix substrate used for a transmission-type liquid crystal displaydevice is described with reference to FIGS. 9A to 9C.

For the manufacture of the active matrix substrate, the manufacturingprocess up to the formation of a contact hole reaching a semiconductorlayer is conducted, following the process of Embodiment 1. Next, theconnection electrode 165 for connecting the source wiring 137 and thesource region, a gate wiring 300, and a connection electrode 301 forconnecting the drain electrode and the pixel electrode are formed (FIG.9A). These electrodes and wirings are obtained by forming anelectrically conductive metal film by sputtering or vacuum evaporationbefore patterning. The structure is described in detail with referenceto FIG. 9B, taking the connection electrode 301 as an example. A Ti film301 a is formed to a thickness of 50 to 150 nm so as to form a contactwith a semiconductor layer that forms a source region or a drain regionof an island shape semiconductor layer. An Al film 301 b is formed to athickness of 300 to 400 nm so as to overlap the Ti film 301 a, and thena Ti film 301 c or a titanium nitride (TiN) film is formed thereon to athickness of 100 to 200 nm so as to obtain a triple-layered structure.Thereafter, a transparent electrically conductive film is formed on theentire surface of the triple-layered structure, and is then subjected toa patterning treatment using a photomask and an etching treatment toform a pixel electrode 303. The pixel electrode 303 is formed on asecond interlayer-insulating film made of an organic resin material, andhas a portion overlapping the connection electrode 301 of a pixel TFT404 so as not to be through a contact hole, thereby forming anelectrical connection.

Alternatively, a connection portion may be formed in the followingprocess. First, a transparent electrically conductive film is formed ona second interlayer insulating film. Then, after a patterning treatmentand an etching treatment are conducted to form the pixel electrode, theconnection portion is formed so as not to be through the contact hole byforming the connecting electrode in partial contact with the pixelelectrode. As a material of the transparent electrically conductivefilm, indium oxide (In₂O₃), an alloy of indium oxide and tin oxide(In₂O₃—SnO₂; ITO) or the like can be formed by using sputtering, vacuumevaporation or the like. An etching treatment for such materials isconducted by using a hydrochloric acid type solution. Since a residue islikely to be generated in the etching of ITO, an alloy of indium oxideand zinc oxide (In₂O₃—ZnO) may alternatively be used to improve theetching processability. Since the alloy of indium oxide and zinc oxideis excellent in surface smoothness as well as in thermal stability ascompared with ITO, the use of the alloy of indium oxide and zinc oxidecan avoid the Al film 301 b from contacting the pixel electrode 303 onthe end face of the connection electrode 301 to cause a corrosivereaction. Similarly, zinc oxide is also a suitable material for thetransparent electrically conductive film. In addition, zinc oxide towhich gallium (Ga) is added (ZnO:Ga) can be used to enhance atransmissivity of visible light and an electrical conductivity.

FIG. 25 is a top view of a pixel. The pixel shown in FIG. 25 has anaperture ratio of about 56%. The components corresponding to those inFIGS. 9A through 9C are denoted by the same reference numerals.

FIG. 9C is a cross-sectional view of an terminal portion of atransmission-type liquid crystal display device. The external inputterminal provided on the side of the active matrix substrate includesthe wiring 311 made of the same layer as the first electrode and thesource wiring and the wiring 309 made of the same layer as the pixelelectrode. Certainly, it is merely an example showing the structure ofthe terminal section; the external input terminal may be formed byeither the wiring 133 or the wiring 309. For example, in the case wherethe external input terminal is formed by the wiring 311 formed of thesame layer as the first electrode and the source wiring, the overlayinginterlayer insulating film is required to be removed.

The wiring 309 made of the same layer as the pixel electrode has atriple-layered structure of a Ti film 309 a, an Al film 309 b and a Tifilm 309 c. A treatment for forming an oxide in the region where Al isexposed is conducted after the formation of the wiring 309, so that theAl film 309 b can be prevented from contacting the pixel electrode 303to cause a corrosive reaction.

The FPC is formed by the base film 312 and the wiring 313. The wiring313 and the wiring 309 made of the same layer as the pixel electrode arebonded with each other through an anisotropic electrically conductiveadhesive made of a thermosetting adhesive 314 and electricallyconductive particles 316 dispersed therein, thereby forming anelectrical connection structure.

As described above, the active matrix substrate allowing the manufactureof a reflection-type liquid crystal display device is manufactured withfive photomasks in Embodiment 1 while an active matrix substrate whichcan be used for a transmission-type liquid crystal display device can bemanufactured with an additional photomask (six photomasks in total).This embodiment is described as conducting the same manufacturingprocess as that of Embodiment 1; such a structure is applicable toEmbodiment 2.

[Embodiment 5]

In this embodiment, an example where a laminate structure of Ag and Alis used as a second wiring is shown in FIG. 10. The structure ofEmbodiment 5 is identical with that of Embodiment 1 except for a secondwiring pattern. Only a part different from Embodiment 1 will bedescribed below.

In this embodiment, a laminate structure including Ag of a highreflectance is used as a draw electrode 609. The draw electrode 609 ismanufactured simultaneously with a pixel electrode, a connectionelectrode and a gate wiring that are not shown. A layer 609 a is anelectrically conductive layer made of Al having a low resistance while alayer 609 b is an electrically conductive layer containing Ag as a maincomponent having a high reflectance. Such a combination allows therealization of an active matrix substrate having a high reflectance aswell as a low wiring resistance.

This embodiment can be freely combined with any one of Embodiments 1 to4.

[Embodiment 6]

An example in which a TFT structure of an active matrix substratediffers from that of Embodiment 1 is explained in Embodiment 6 withreference to FIG. 11.

A driver circuit 857 having a logic circuit portion 855 containing afirst p-channel TFT 850 and a second n-channel TFT 851, and a samplingcircuit 856 made from a second n-channel TFT 852; and a pixel portion858 having a pixel TFT 853 and a storage capacitor 854, are formed onthe active matrix substrate shown in FIG. 11. The TFT of the logiccircuit portion 855 of the driver circuit 857 forms a circuit such as ashift register circuit or a buffer circuit, and the TFT of the samplingcircuit 856 basically forms an analog switch.

These TFTs are formed by forming channel forming regions, sourceregions, drain regions, and LDD regions in island shape semiconductorlayers 803 to 806 on a base film 802 formed on a substrate 801. The basefilm and the island shape semiconductor layers are formed similar tothose in Embodiment 1. Gate electrodes 809 to 812 formed on a gateinsulating film 808 are formed having a tapered shape in their edgeportions, and LDD regions are formed using these portions. This type oftapered shape can be formed by an anisotropic etching technique of a Wfilm using an ICP etching apparatus, similar to Embodiment 1. Further, asource wiring 813 and a second electrode (capacitor electrode) 815 havea tapered shape.

The LDD regions formed utilizing the tapered portions are formed inorder to increase reliability of n-channel TFTs, and on-currentdegradation due to the hot carrier effect is prevented by the LDDregions. Regarding the LDD regions, ions of the impurity element areaccelerated by an electric field and added to semiconductor filmsthrough edge portions of the gate electrode, and through the gateinsulating film in the vicinity of the edge portions, by ion dopingmethod.

A first LDD region 835, a second LDD region 834, and a source or drainregion 833 are formed outside a channel forming region 832 in the firstn-channel TFT 851, and the first LDD region 835 is formed so as tooverlap the gate electrode 810. Further, an n-type impurity elementcontained in the first LDD region 835 and the second LDD region 834 ishigher in the second LDD region 834 due to the difference in the filmthickness of the upper layer gate insulating film and the gateelectrode. The second n-channel TFT 852 is also formed having a similarstructure, and is composed of a channel forming region 836, a first LDDregion 839 overlapping the gate electrode, a second LDD region 838, anda source or drain region 837. On the other hand, the p-channel TFT 850has a single drain structure, and impurity regions 829 to 831, in whicha p-type impurity is added to the outside of a channel forming region828, are formed.

The pixel TFT formed of an n-channel TFT in the pixel portion 858 isformed by a multi-gate structure with the aim of reducing the offcurrent, and a first LDD region 843 overlapping the gate electrode, asecond LDD region 842, and a source or drain region 841 are formedoutside a channel forming region 840. Further, the storage capacitor 854is formed from an island shape semiconductor layer 807, an insulatinglayer formed from the same layer as the gate insulating film 808, and asecond electrode 815. A p-type impurity is added to the island shapesemiconductor layer 807, and the voltage applied to the second electrodecan be made lower due to the low resistivity.

An interlayer insulating film is formed of a first interlayer insulatingfilm 816 having a thickness of 50 to 500 nm and made from an inorganicmaterial such as silicon oxide, silicon nitride, or silicon oxynitride,and a second interlayer insulating film 817 made from an organicinsulating material such as polyimide, acrylic, polyimide amide, or BCB(benzocyclobutene). A well leveled surface can thus be obtained byforming the second interlayer insulating film with an organic insulatingmaterial. Further, organic resin materials generally have low dielectricconstants, and therefore parasitic capacitance can be reduced. However,organic resin materials are hygroscopic and not suitable as protectivefilms. It is therefore preferable to form the second interlayerinsulating film in combination with the first interlayer insulating film816.

A resist mask having a predetermined pattern is formed next, and contactholes for reaching source regions or drain regions of the respectiveisland shape semiconductor layers are formed. The contact holes areformed by dry etching. A mixed gas of CF₄, O₂, and He is used as anetching gas in this case, and the interlayer insulating film made fromthe organic resin material is etched first. The protecting insulatingfilm is etched next with CF₄ and O₂ as an etching gas. In addition, byswitching the etching gas to CHF₃ in order to increase the selectivitywith respect to the island shape semiconductor layers, the gateinsulating film is etched. Thus, good contact holes can be formed.

A conductive metallic film is then formed by sputtering or vacuumevaporation, a resist mask pattern is formed, and source and drainwirings 818 to 823, a pixel electrode 827, a gate wiring 826 and aconnection electrode 825 are formed by etching. An active matrixsubstrate having the pixel portion with the pixel structure as shown inFIG. 1 can thus be formed. Furthermore, the active matrix liquid crystaldisplay device shown in Embodiment 2 can be manufactured by using theactive matrix substrate of Embodiment 6.

Moreover, although the example where the gate electrode and the sourcewiring are simultaneously formed is given in this embodiment, anothermask may be additionally formed and the gate electrode and the firstelectrode may be separately formed in different manufacturing steps.Specifically, a portion overlapping the semiconductor layer which is toserve as a gate electrode is first formed. After successively adding ann-type or a p-type impurity element to the portion serving as gateelectrode and activating this portion, the first electrode is formed soas to overlap the gate electrode. At this point, a contact between thegate electrode and the first electrode is formed not by forming acontact hole but merely by superposing the first electrode on the gateelectrode. Moreover, the source wiring is formed simultaneously with thefirst electrode. This allows the utilization of aluminum or copperhaving a low resistance as a material of the first electrode and thesource wiring.

[Embodiment 7]

Another example in which a TFT structure of an active matrix substratediffers from that of Embodiment 1 is explained in Embodiment 7 withreference to FIG. 12.

A driver circuit 957 having a logic circuit portion 955 comprising afirst p-channel TFT 950 and a second n-channel TFT 951, and a samplingcircuit portion 956 formed of a second n-channel TFT 952; and a pixelportion 958 having a pixel TFT 953 and a storage capacitor 954, areformed on the active matrix substrate shown in FIG. 12. The TFT of thelogic circuit portion 955 of the driver circuit 957 forms a circuit suchas a shift register circuit or a buffer circuit, and the TFT of thesampling circuit 956 basically forms an analog switch.

For the active, matrix substrate shown in Embodiment 7, a base film 902is first formed on a substrate 901, of a film such as a silicon oxidefilm or a silicon oxynitride film, having a thickness of 50 to 200 nm.Island shape semiconductor layers 903 to 907 are formed next from acrystalline semiconductor film manufactured by laser crystallization orthermal crystallization. A gate insulating film 908 is formed on theisland shape semiconductor layers. An impurity element which impartsn-type conductivity, typically phosphorous (P) is then selectively addedto the island shape semiconductor layers 904 and 905, which formn-channel TFTs, and to the island shape semiconductor layer 907, whichforms a storage capacitor, at a concentration of 1×10¹⁶ to 1×10¹⁹atoms/cm³.

Gate electrodes 909 to 912, a second electrode (capacitor electrode)915, and a source wiring 913 are formed by a material having W or TaN asa constituent. The gate electrode, the second electrode, and the sourcewiring may also be separately formed by a material having a lowresistivity such as Al. An impurity element which imparts n-typeconductivity, typically phosphorous (P) is then selectively added at aconcentration of 1×10¹⁹ to 1×10²¹ atoms/cm³ to regions outside theisland shape semiconductor layers 903 to 907, outside the gateelectrodes 909 to 912, and outside the second electrode 915. Channelforming regions 931 and 934, LDD regions 933 and 936, and source ordrain regions 932 and 935 are thus formed in the first n-channel TFT 951and in the second n-channel TFT 952, respectively. An LDD region 939 ofthe pixel TFT 953 is formed in a self-aligning manner using the gateelectrode 912, and is formed outside a channel forming region 937. Asource or drain region 938 is formed similar to the first and the secondn-channel TFTs.

An interlayer insulating film is formed, similar to Embodiment 3, of afirst interlayer insulating film 916 made from an inorganic materialsuch as silicon oxide, silicon nitride, or silicon oxynitride, and asecond interlayer insulating film 917 made from an organic insulatingmaterial such as polyimide, acrylic, polyimide amide, or BCB(benzocyclobutene). A resist mask having a predetermined pattern isformed next, and contact holes for reaching source regions or drainregions formed in the respective island shape semiconductor layers areformed. A conductive metallic film is then formed by sputtering orvacuum evaporation, and source wirings and drain wirings 918 to 923, apixel electrode 927, a gate wiring 926, and a connection electrode 925are formed. An active matrix substrate having the pixel portion with thepixel structure shown in FIG. 1 can thus be formed. Further, the activematrix liquid crystal display device shown in Embodiment 2 can also bemanufactured using the active matrix substrate of Embodiment 7.

The first n-channel TFT 951 of the logic circuit portion 955 has astructure in which a GOLD region overlapping the gate electrode isformed on the drain side. High electric field regions generated in thevicinity of the drain region are relieved by the GOLD region, hotcarrier generation is prevented, and degradation of the TFT can beprevented. An n-channel TFT having this type of structure is suitable inbuffer circuits and shift register circuits. On the other hand, thesecond n-channel TFT 952 of the sampling circuit portion 956 has astructure in which a GOLD region and an LDD region are formed on thesource side and on the drain side, which prevents deterioration due tohot carriers in an analog switch that operates by polarity inversion. Inaddition, this structure aims to reduce the off current. The pixel TFT953 has an LDD structure, and is formed by multiple gates, and astructure thereof aims to reduce the off current. On the other hand, thep-channel TFT is formed with a single drain structure, and impurityregions 929 and 930, into which a p-type impurity element is added, areformed outside a channel forming region 928.

The TFTs structuring each circuit are thus optimized in response to thespecification required by the pixel portion and the driver circuit, andthe active matrix substrate shown in FIG. 12 has a structure which, inparticular, is made in consideration of increasing the operatingcharacteristics and reliability of each circuit.

Moreover, although the example where the gate electrode and the sourcewiring are simultaneously formed is given in this embodiment, anothermask may be additionally formed and the gate electrode and the firstelectrode may be separately formed in different manufacturing steps.Specifically, a portion overlapping the semiconductor layer which is toserve as a gate electrode is first formed. After successively adding ann-type or a p-type impurity element to the portion serving as gateelectrode and activating this portion, the first electrode is formed soas to overlap the gate electrode. At this point, a contact between thegate electrode and the first electrode is formed not by forming acontact hole but merely by superposing the first electrode on the gateelectrode. Moreover, the source wiring is formed simultaneously with thefirst electrode. This allows the utilization of aluminum or copperhaving a low resistance as a material of the first electrode and thesource wiring.

[Embodiment 8]

In this embodiment, a pixel structure different from that shown in FIG.1 is shown in FIG. 13. A cross-sectional structure thereof is shown inFIG. 14, illustrating a cross section taken along the line of A-A′ and across-section taken along the line of G-G′. Only the structure of astorage capacitor is different from that of Embodiment 1, and thestructure of this embodiment other than the storage capacitor issubstantially identical with that of Embodiment 1.

In this embodiment, the storage capacitor is formed by a secondsemiconductor layer 1002 and a capacitor electrode 1005 using aninsulating film on the second semiconductor layer 1002 as a dielectric.A first semiconductor layer is denoted by the reference numeral 1001.The capacitor electrode 1005 is connected to a storage wiring 1009. Thecapacitor electrode 1005 is formed simultaneously with the firstelectrode 1004 and the source wiring 1006 on the same insulating film.Moreover, the capacitor wiring is formed simultaneously with the pixelelectrode 1011, the connection electrode 1010 and the gate wiring 1007on the same insulating film.

In this embodiment, an impurity element for imparting an n-typeconductivity is added to impurity regions 1012 through 1014, as in thepixel TFT. This structure can be applied even for a large size displaypanel such as 10 inches or more in diagonal.

Moreover, although the example where the gate electrode and the sourcewiring are simultaneously formed is given in this embodiment, anothermask may be additionally formed and the gate electrode, the firstelectrode and the capacitor wiring may be separately formed in differentmanufacturing steps. Specifically, a portion overlapping thesemiconductor layer which is to serve as a gate electrode is firstformed. After successively adding an n-type or a p-type impurity elementto the portion serving as gate electrode and activating this portion,the first electrode is formed so as to overlap the gate electrode. Atthis point, a contact between the gate electrode and the first electrodeis formed not by forming a contact hole but merely by superposing thefirst electrode on the gate electrode. Moreover, the source wiring andthe capacitor wiring are formed simultaneously with the first electrode.This allows the utilization of aluminum or copper having a lowresistance as a material of the first electrode and the source wiring.Furthermore, an n-type or p-type impurity element is added to theportion of the semiconductor layer overlapping the capacitor wiring toincrease a storage capacitor.

According to this embodiment, the active matrix substrate can bemanufactured by altering the mask design of Embodiment 1 withoutincreasing the number of masks.

This embodiment can be freely combined with any one of Embodiments 1 to5.

[Embodiment 9]

Embodiment 9 represents another method of fabricating the crystallinesemiconductor layer for forming the semiconductor layer of the TFT ofthe active matrix substrate represented by Embodiment 1. In thisembodiment, the crystallization method using a catalytic element, thatis disclosed in Japanese Patent Laid-Open No. 7-130652, can be applied.An example of this case will be explained below.

Base films and an amorphous semiconductor layer are formed to athickness of 25 to 80 nm on a glass substrate in the same way as inEmbodiment 1. An amorphous silicon film, for example, is formed to athickness of 55 nm. An aqueous solution containing 10 ppm, calculated byweight, of a catalytic element is applied by a spin coating method toform a layer containing the catalytic element. Examples of the catalyticelement include nickel (Ni), germanium (Ge), iron (Fe), palladium (Pd),tin (Sn), lead (Pb), cobalt (Co), platinum (Pt), copper (Cu) and gold(Au). Besides spin coating, the layer 170 containing the catalyticelement may be formed by sputtering or vacuum deposition so that thethickness of the layer of the catalytic element is 1 to 5 nm.

In the crystallization step, heat treatment is conducted first at 400 to500° C. for about 1 hour and the hydrogen content of the amorphoussilicon film is lowered to not greater than 5 atom %. Heat annealing isthen conducted in a nitrogen atmosphere at 550 to 600° C. for 1 to 8hours inside a furnace annealing oven. The crystalline semiconductorlayer comprising the crystalline silicon film can be obtained inaccordance with the above mentioned process.

By forming the island semiconductor layers from the crystallinesemiconductor layers manufactured as above mentioned, an active matrixsubstrate can be completed, similarly to Embodiment 1. However, incrystallization process, if a catalytic element for promoting thecrystallization of silicon is used, a small amount (about 1×10⁷ to 1×10⁹atoms/cm³) of the catalytic element remains within the islandsemiconductor layers. It is, of course, possible to complete the TFT insuch a state, but it is preferred to remove the remaining catalyticelement from at least the channel forming region. One of the means ofremoving this catalytic element is a means using gettering effect ofphosphorous (P).

A gettering treatment with phosphorus (P) for this purpose can beconducted simultaneously with the activation step explained in FIG. 3C.The concentration of phosphorus (P) necessary for gettering may beapproximate to the impurity concentration of the high concentrationn-impurity region. Thermal annealing of the activation step can allowthe catalytic element to segregate from the channel formation region ofthe n-channel TFT and the p-channel TFT to the impurity regioncontaining phosphorus (P) in that concentration. As a result, thecatalytic element segregates in a concentration of 1×10¹⁷ to 1×10¹⁹atoms/cm³ in the impurity region. The TFT thus fabricated has a loweredOFF current value and has high crystallinity. Therefore, a high fieldeffect mobility can be obtained, and excellent characteristics can beaccomplished.

This embodiment can be freely combined with one of the structure ofEmbodiments 1 to 8.

[Embodiment 10]

In this embodiment, a pixel structure (IPS system) different from thatof Embodiment 1 is shown in FIG. 15. A cross-sectional structure thereofis shown in FIG. 16, illustrating a cross section taken along the lineof A-A′ and a cross-section taken along the line of H-H′.

This embodiment shows an example of an active matrix liquid crystaldisplay device of an IPS (In-Plane Switching) system (also referred toas a horizontal electric field system). The IPS system is characteristicin that a pixel electrode and a common wiring are both formed on one ofa pair of substrates and that an electric field is applied in ahorizontal direction. As a result, the longitudinal axes of liquidcrystal molecules are controlled to be oriented substantially parallelto the surface of the substrate. The utilization of the IPS systemallows a viewing angle to be increased.

In FIG. 15, a first semiconductor layer is denoted by the referencenumeral 1101, second semiconductor layer by 1102, a first electrode by1104, a second electrode by 1105, a source wiring by 1106, a gate wiringby 1107, common wirings by 1108 and 1109, a connection electrode by1110, and a pixel electrode by 1111. The pixel electrode 1111 and thecommon wirings 1108 and 1109 are placed so that an electric fieldparallel to the surface of the substrate is generated. The commonwirings 1108 and 1109 are placed so as to overlap the source wiring1106, resulting in improvement of the aperture ratio of the pixelportion.

As shown in FIG. 16, the first electrode 1104, the second electrode 1105and the source wiring 1106 are simultaneously formed on the insulatingfilm covering the first semiconductor layer 1101 and the secondsemiconductor layer 1102. The pixel electrode 1111, the connectionelectrode 1110, the gate wiring 1107 and the common wiring 1109 aresimultaneously formed on the interlayer insulating film covering thesource wiring 1106.

The first electrode 1104 is electrically connected to the gate wiring1107. The first electrode 1104 overlapping the first semiconductor layer1101 functions as a gate electrode.

Although the oblong-shaped pixel electrode is shown in this embodiment,the pixel electrode and a common electrode may have a V-shaped electrodestructure to further increase a viewing angle. The storage capacitor isformed by the second semiconductor layer 1102, the insulating filmcovering the second semiconductor layer 1102, and the second electrode1105. The second electrode 1105 is electrically connected to a gatewiring of the adjacent pixel. Moreover, an impurity element forimparting a p-type conductivity is added to the second semiconductorlayer 1102.

The pixel structure of this embodiment can be obtained by the samemanufacturing process as that of Embodiment 1 with the change in themask pattern of Embodiment 1.

After the state shown in FIGS. 15 and 16 are obtained by usingEmbodiment 1, a liquid crystal display device is obtained by the methoddescribed in Embodiment 2. The gap between pixels is shielded from lightby using a color filter provided on the counter substrate in a similarmanner as in Embodiment 2. However, since the IPS system is employed, itis necessary to alter an orientation treatment and the like.

[Embodiment 11]

In this embodiment, a pixel structure of the IPS system different fromthat of Embodiment 10 is shown in FIG. 17. A cross-sectional structurethereof is shown in FIG. 18, illustrating a cross section taken alongthe line J-J′ and a cross-section taken along the line K-K′. Only thestructure of a pixel electrode of this embodiment is different from thatof Embodiment 10, and the structure other than the pixel electrode issubstantially identical with that of Embodiment 10.

In FIG. 17, a first semiconductor layer is denoted by the referencenumeral 1201, second semiconductor layer by 1202, a first electrode by1204, a second electrode by 1205, a source wiring by 1206, a gate wiringby 1207, common wirings by 1208 and 1209, a first connection electrodeby 1210, a pixel electrode by 1211, and second connection electrodes by1212 and 1213. The pixel electrode 1211 and the common wirings 1208 and1209 are placed so that an electric field parallel to the surface of thesubstrate is generated. As the pixel electrode 1211, an electricallyconductive film (an ITO film or the like) having a light transmittanceis used. An additional mask is provided for patterning of theelectrically conductive film having a light transmittance; so thatsecond connection electrode overlaps the pixel electrode to allowelectrical connection. An electrically conductive film having a lighttransmittance is used as the pixel electrode to improve an apertureratio. Moreover, the common wirings 1208 and 1209 are placed so as tooverlap the source wiring 1206 to improve an aperture ratio of the pixelportion.

As shown in FIG. 18, the first electrode 1204, the second electrode1205, the source wiring 1206 are simultaneously formed on the insulatingfilm covering the first semiconductor layer 1201 and the secondsemiconductor layer 1202. Moreover, the first connection electrode 1210,the gate wiring 1207, the common wiring 1209, and the second connectionelectrodes 1213 and 1212 are simultaneously formed on the interlayerinsulating film-covering the source wiring 1206.

The first electrode 1204 is electrically connected to the gate wiring1207, and a portion of the first electrode 1204 overlapping the firstsemiconductor layer 1201 functions as a gate electrode.

Although the oblong-shaped pixel electrode is shown in this embodiment,the pixel electrode 1211 and a common electrode may have a V-shapedelectrode structure to further increase a viewing angle.

The storage capacitor is formed by the second semiconductor layer 1202,the insulating film covering the second semiconductor layer 1202 and thesecond electrode 1205. The second electrode 1205 is electricallyconnected to the gate wiring of an adjacent pixel. Moreover, an impurityelement for imparting a p-type conductivity is added to the secondsemiconductor layer 1202.

The pixel structure of this embodiment can be obtained in the samemanufacturing process as that of Embodiment 1 if the mask pattern ofEmbodiment 1 is changed.

After the state shown in FIGS. 15 and 16 is obtained by using Embodiment1, a liquid crystal display device is obtained by the method describedin Embodiment 2. The gap between pixels is shielded from light by usinga color filter provided on a counter substrate as in Embodiment 2.However, since the IPS system is employed in this embodiment, it isnecessary to alter an orientation treatment and the like.

[Embodiment 12]

In this embodiment, a cross-sectional structure of a storage capacitor,different from that of Embodiment 1 is shown in FIG. 19. Only thestructure of a storage capacitor of this embodiment is different fromthat of Embodiment 1, and the structure other than the storage capacitoris substantially identical with that of Embodiment 1. The componentsdesignated by the same reference numerals as those of Embodiment 1correspond to the components of Embodiment 1.

First, after the state where the interlayer insulating film 157 isformed is obtained following the manufacturing process of Embodiment 1,an additional mask is provided for selective etching so as to partiallyremove the interlayer insulating film 157. As a result of selectiveetching, an interlayer insulating film 1300 made of an organic resin andthe interlayer insulating film 157 are selectively left. Next, a pixelelectrode 1302 is formed thereon.

As in Embodiment 1, a storage capacitor is formed by the semiconductorfilm including the impurity regions 154 to 156 and a capacitor electrode1301, using the first insulating film as a dielectric in this example.Additionally, another storage capacitor is formed by the capacitorelectrode 1301 and the pixel electrode 1302, using the interlayerinsulating film 157 as a dielectric. An impurity element for impartingan n-type or a p-type conductivity is added to the impurity regions 154to 156, as in the pixel TFT.

With such a structure, the amount of the storage capacitor can befurther increased.

This embodiment can be freely combined with any one of Embodiments 1 to9.

[Embodiment 13]

The CMOS circuit and the pixel portion in accordance with the presentinvention can be used for various electro-optical devices (the activematrix type liquid crystal display device and the active matrix type ECdisplay device). Therefore the present invention can be applied to allthose electronic appliances in which such electro-optical devices areincluded in the display portion.

The following can be given as such electronic appliances: a videocamera, a digital camera, a projector (rear type or front type), ahead-mounted display (a goggle type display), a car navigation system, acar stereo, a personal computer, and a portable information terminal(such as a mobile computer, a portable telephone or an electronic book).Examples of these are shown in FIGS. 20, 21 and 22.

FIG. 20A is a personal computer, and it includes a main body 2001, animage input portion 2002, a display portion 2003, and a keyboard 2004,etc. The present invention can be applied to the image input portion2002, the display portion 2003 or other driver circuits.

FIG. 20B is a video camera, and it includes a main body 2101, a displayportion 2102, an audio input portion 2103, operation switches 2104, abattery 2105, and an image receiving portion 2106, etc. The presentinvention can be applied to the display portion 2102 or other drivercircuits.

FIG. 20C is a mobile computer, and it includes a main body 2201, acamera portion 2202, an image receiving portion 2203, operation switches2204, and a display portion 2205. The present invention can be appliedto the display portion 2205 or other signal controlling circuits.

FIG. 20D is part of a head mounted type display (right-handed), and itincludes a main body 2301, a signal cable 2302, a head fixation band2303, a display portion 2304, an optical system 2305 and the displaydevice 2306, etc. The present invention can be applied to the displaydevice 2306.

FIG. 20E is a player that uses a recording medium on which a program isrecorded (hereafter referred to as a recording medium), and the playerincludes a main body 2401, a display portion 2402, a speaker portion2403, a recording medium 2404, and operation switches 2405, etc. Notethat this player uses a recording medium such as a DVD (digitalversatile disk) or a CD, and the appreciation of music, the appreciationof film, game playing and the Internet can be performed. The presentinvention can be applied to the display portion 2402 or other drivercircuits.

FIG. 20F is a digital camera, and it includes a main body 2501, adisplay portion 2502, an eyepiece portion 2503, operation switches 2504,and an image receiving portion (not shown in the figure), etc. Thepresent invention can be applied to the display portion 2502 or otherdriver circuits.

FIG. 21A is a front type projector which comprises: a display device2601; and a screen 2602. The present invention can be applied to theliquid crystal display device 2808 consisting one portion of the displaydevice 2601 or other driver circuits.

FIG. 21B is a rear type projector which comprises: a main body 2701; adisplay device 2702; a mirror 2703; and a screen 2704. The presentinvention can be applied to a liquid crystal display device 2808comprising one portion of the display device 2702 or other drivercircuits.

FIG. 21C is a diagram which shows an example of the structure of thedisplay devices 2601 and 2702 of FIGS. 21A and 21B. Each of the displaydevice 2601 and 2702 comprises: an optical light source system 2801;mirrors 2802 and 2804 to 2806; a dichroic mirror 2803; a prism 2807; aliquid crystal display device 2808; a phase differentiating plate 2809;and a projection optical system 2810. The projection optical system 2810comprises a plurality of optical lenses having a projection lens. Thoughthe present embodiment shows an example of 3-plate type, this is not tolimit to this example and a single plate type may be used for instance.Further, an operator may appropriately dispose an optical lens, a filmwhich has a function to polarize light, a film which adjusts a phasedifference and an IR film, etc in the optical path shown by an arrow inFIG. 21C.

FIG. 21D is a diagram showing an example of a structure of the opticallight source system 2801 of FIG. 21C. In the present embodiment theoptical light source system 2801 comprises: a reflector 2811; a lightsource 2812; lens arrays 2813 and 2814; a polarizer conversion element2815; and a condenser lens 2816. Note that the optical light sourcesystem shown in FIG. 21D is merely an example and the structure is notlimited to this example. For instance, an operator may appropriatelydispose an optical lens, a film which has a function to polarize light,a film which adjusts a phase difference and an IR film, etc.

The projector shown in FIG. 21 uses a transmission type electro-opticaldevice and the application example to a reflection type electro-opticaldevice is not illustrated.

FIG. 22A is a portable telephone which comprises: a main body 2901, anaudio output portion 2902, an audio input portion 2903, a displayportion 2904, operation switches 2905, and an antenna 2906, etc. Thepresent invention can be applied to the an audio output portion 2902, anaudio input portion 2903, and a display portion 2904 or other drivercircuits.

FIG. 22B is a portable book (electronic book) which comprises: a mainbody 3001, display portions 3002 and 3003, a recording medium 3004,operation switches 3005, and an antenna 3006, etc. The present inventioncan be applied to the display portions 3002 and 3003 or other drivercircuits.

FIG. 22C is a display which comprises: a main body 3101, a support stand3102, and a display portion 3103, etc. The present invention can beapplied to the display portion 3103. The display of the presentinvention is advantageous for a large size screen in particular, and isadvantageous for a display equal to or greater than 10 inches(especially equal to or greater than 30 inches) in the diagonal.

The applicable range of the present invention is thus extremely wide,and it is possible to apply the present invention to electronicappliances in all fields. Further, the electronic appliances of thisembodiment can be realized by using a constitution of any combination ofembodiments 1 to 12.

[Embodiment 14]

Although the first etching treatment for forming the electricallyconductive layer of the first shape is conduced under the conditionwhere the etching is performed once in Embodiment 1, the etchingtreatment may be performed for a plurality of times so as to prevent thethickness of the insulating film from being reduced as well as toimprove the uniformity of the shape. In this embodiment, an examplewhere the first etching treatment is conducted twice to form theelectrically conductive layer of the first shape is described.

Although tapered shapes are formed on either side of the gate electrodeand LDD regions are formed on either side of the channel formationregion in the present invention, this embodiment will be described withreference to FIGS. 24A to 24D illustrating enlarged cross-sectionalviews of only one side of the vicinity of the gate electrode in themanufacturing process. For simplicity, a base film and a substrate arenot shown in FIGS. 24A to 24D.

First, following the manufacturing process of Embodiment 1, the stateshown in FIG. 2A is obtained. It is sufficient to set the thickness ofthe first electrically conductive film to be 20 to 100 nm and thethickness of the second electrically conductive film to be 100 to 400nm. In this embodiment, the first electrically conductive film made ofTaN having the thickness of 30 nm and the second electrically conductivefilm made of W having the thickness of 370 nm are laminated. TaN ispreferable as a material of the first electrically conductive film forits extremely high heat resistance.

Next, a mask 1405 a of a first shape made of a resist is formed. Then,etching is performed by an ICP method to form a second electricallyconductive film 1404 a of the first shape. As a result of using a mixedgas of CF₄, Cl₂ and O₂ as an etching gas having a high selective ratiowith respect to TaN, the state shown in FIG. 24A can be obtained. Table1 shows the relation between various etching conditions and the etchingrate of the second electrically conductive layer (W), the etching rateof the first electrically conductive layer (TaN), or the tapered angleof the second electrically conductive layer (W).

TABLE 1 Etching rates (E.R) of W and N and tapered angle of W W TaNW/TaN W ICP Bias Pressure CF₄ Cl₂ O₂ E.R. {circle around (1)} E.R.{circle around (2)} selection ratio taper angle No. [W] [W] [Pa] [SCCM][nm/min] [nm/min] {circle around (1)}/{circle around (2)} [deg] 1 500 201.0 30 30 0  58.97 66.43 0.889 80 2 500 60 1.0 30 30 0  88.71 118.460.750 25 3 500 100 1.0 30 30 0 111.66 168.03 0.667 18 4 500 20 1.0 25 2510 124.62 20.67 6.049 70 5 500 60 1.0 25 25 10 161.72 35.81 4.528 35 6500 100 1.0 25 25 10 176.90 56.32 3.008 32 7 500 150 1.0 25 25 10 200.3980.32 2.495 26 8 500 200 1.0 25 25 10 218.20 102.87 2.124 22 9 500 2501.0 25 25 10 232.12 124.97 1.860 19 10 500 20 1.0 20 20 20 — (*) 14.83 —— 11 500 60 1.0 20 20 20 193.02 14.23 13.695  37 12 500 100 1.0 20 20 20235.27 21.81 10.856  29 13 500 150 1.0 20 20 20 276.74 38.61 7.219 26 14500 200 1.0 20 20 20 290.10 45.30 6.422 24 15 500 250 1.0 20 20 20300.34 50.25 6.091 22 (*) The mark — in the cells indicates that themeasurement was impossible due to change in quality of the surface of Wduring etching.

The term “tapered angle” in the specification indicates an angle formedbetween the horizontal plane and the side face of the material layer asshown in the upper right part of FIG. 24A.

The angle (tapered angle α1) formed between the horizontal plane and theside face of the second electrically conductive layer (W) can be freelyset between 19 and 70 degrees by setting the first etching condition to,for example, one of the conditions 4 through 15 in Table 1. The etchingtime may be appropriately set by the implementers.

In FIG. 24A, a semiconductor layer is denoted by the reference numeral1401, an insulating film by 1402, and a first electrically conductivefilm by 1403.

Next, etching is conducted under the second etching condition with themask 1405 a being left as it is to form the first electricallyconductive layer 1403 of the first shape. During etching under thesecond etching condition, the insulating film 1402 is also etched tocertain degree, resulting in an insulating film 1402 a of the firstshape. In this embodiment, a mixed gas of CF₄ and Cl₂ is used as anetching gas for the second etching condition. As the second etchingcondition, for example, any one of the conditions 1 through 3 in Table 1may be used. As described above, by conducting the first etchingtreatment under the conditions where the etching is performed twice, thethickness of the insulating film 1402 can be prevented from beingreduced.

Next, a first doping treatment is conducted. An impurity element forimparting one conductivity to the semiconductor, phosphorus forimparting an n-type conductivity in this embodiment, is added to thesemiconductor layer 1401 by an ion doping method, using the firstelectrically conductive layer 1403 a of the first shape and the secondelectrically conductive layer 1404 a of the first shape as masks (FIG.24B). Although the second electrically conductive layer 1404 a of thefirst shape is also etched to certain degree during the etching underthe second etching condition in FIG. 24B, the second electricallyconductive layer 1404 a is shown as having the same shape as that shownin FIG. 24A because the amount of etching is small.

Next, a second etching is conducted with the mask 1405 a being left asit is to obtain the state shown in FIG. 24C. In this embodiment, afteretching is conducted as a second etching treatment under the firstetching condition where a mixed gas of CF₄ and Cl₂ is used as an etchinggas, etching is conducted under the second etching condition where amixed gas of CF₄, Cl₂ and O₂ is used as an etching gas. As these etchingconditions, any one of the conditions in Table 1 may be used and theetching time may be appropriately set. A width of each of theelectrically conductive layers in the longitudinal direction of thechannel can be freely set by selecting the etching condition. The secondetching treatment allows the formation of a mask 1405 b of a secondshape, a first electrically conductive layer 1403 b of the second shape,a second electrically conductive layer 1404 b of the second shape, andan insulating film 1402 b of the second shape.

The second electrically conductive layer 1404 b of the second shapeforms a tapered angle α2 greater than the tapered angle α1 whereas thefirst electrically conductive layer 1403 b of the second shape forms anextremely small tapered angle β. Also in the insulating film 1402 b ofthe second shape, a tapered angle γ is partially formed.

Next, after removal of the mask 1405 b, a second doping treatment isconducted (FIG. 24D). The second doping treatment performs the doping ata concentration lower than that of the first doping treatment. In thisembodiment, phosphorus for imparting an n-type conductivity is added tothe semiconductor layer 1401 by an ion doping method, using the secondelectrically conductive layer 1404 b of the second shape as a mask.

As a result of the second doping treatment, impurity regions 1401 athrough 1401 c are formed. A portion of the semiconductor layeroverlapping the second electrically conductive layer sandwiching theinsulating film and the first electrically conductive layer therebetweenserves as a channel formation region. Although not shown, the impurityregions 1401 a through 1401 c are formed on both sides of the channelformation region in a symmetrical manner.

In the doping, the thicker the thickness of the material layerpositioned on the semiconductor layer becomes, the shallower ions areimplanted. Accordingly, the impurity region 1401 c overlapping the firstelectrically conductive layer sandwiching the insulating filmtherebetween, that is, the third impurity region (GOLD region), isaffected by the tapered portion having the side face of the taperedangle β, resulting in change in the concentration of the impurityelement to be added to the semiconductor layer. The concentration of theimpurity decreases as the thickness of the material layer increases, andthe concentration of the impurity increases as the thickness of thematerial layer decreases.

Similarly, the impurity region 1401 b, that is, the second impurityregion (LDD region), is affected by the thickness of the insulating film1402 b of the second shape, resulting in change in the concentration ofthe impurity element to be added to the semiconductor layer.Specifically, the impurity region 1401 b is affected by the thickness ofthe tapered portion having the side face of the tapered angle γ or othertapered portions, resulting in change in the concentration of theimpurity element to be added to the semiconductor layer. The impurityregion 1401 b that does not overlap the first electrically conductivelayer has a higher concentration than that of the impurity region 1401c. Moreover, the width of the impurity region 1401 b in the longitudinaldirection of the channel is as long as that of the impurity region 1401c, or is greater than that of the impurity region 1401 c.

The impurity region 1401 a, that is, the first impurity region containsan impurity element added by the second doping treatment in addition tothe impurity element added by the first doping treatment. As a result,the impurity region 1401 a becomes a high-concentration impurity regionto function as a source region or a drain region.

As the successive steps, the manufacturing process of Embodiment 1 shownin FIG. 3B and from there on may be conducted to manufacture the activematrix substrate.

By the above method, TFTs of the pixel portion and TFTs of the drivercircuit are formed.

This embodiment can be freely combined with any one of Embodiments 1through 4 and Embodiments 7 through 13.

In the case where a mixed gas of SF₆ and Cl₂ is used instead of theetching gas of this embodiment (mixed gas of CF₄ and Cl₂) or a mixed gasof SF₄, Cl₂ and O₂ is used instead of the mixed gas of SF₄, Cl₂ and O₂,the reduction in the thickness can be further prevented because aselective ratio of these gases with respect to the insulating film 1402is extremely high.

According to the present invention, a liquid crystal display devicehaving a pixel structure having a high aperture ratio realized by thepresent invention can be accomplished without increasing the number ofmasks and the number of manufacturing steps.

What is claimed is:
 1. A display device comprising: a source wiring,wherein the source wiring includes a first conductive layer formed overand in contact with an insulating surface, a transistor including a gateelectrode and a semiconductor layer, wherein the gate electrode includesa second conductive layer formed over and in contact with the insulatingsurface; an insulating film formed over the transistor, the firstconductive layer and the second conductive layer, a gate wiring formedover and in contact with the insulating film, wherein the gate wiring isconnected with the gate electrode; and a third conductive layer over andin contact with the insulating film, wherein one of a source region anda drain region of the transistor is electrically connected to the sourcewiring through the third conductive layer, wherein the first conductivelayer and the second conductive layer are formed by patterning a sameconductive film.
 2. The display device according to claim 1, wherein thedisplay device is a liquid crystal device.
 3. The display deviceaccording to claim 1, wherein the gate electrode is located over thesemiconductor layer.
 4. The display device according to claim 1, whereinthe semiconductor layer comprises crystalline silicon.
 5. The displaydevice according to claim 1, further comprising a pixel electrode overthe insulating film, wherein the pixel electrode is electricallyconnected to the other of the source region and the drain region of thetransistor.
 6. The display device according to claim 1, furthercomprising a red color filter overlapped with the semiconductor layer.7. A display device comprising: a source wiring, wherein the sourcewiring includes a first conductive layer formed over and in contact withan insulating surface, a transistor including a gate electrode and asemiconductor layer, wherein the gate electrode includes a secondconductive layer formed over and in contact with the insulating surface;an insulating film formed over the transistor, the first conductivelayer and the second conductive layer, a gate wiring formed over and incontact with the insulating film, wherein the gate wiring is connectedwith the gate electrode; a third conductive layer over and in contactwith the insulating film, wherein one of a source region and a drainregion of the transistor is electrically connected to the source wiringthrough the third conductive layer; and a capacitor wiring formed overand in contact with the insulating film, wherein the capacitor wiringextends in parallel with the gate wiring, wherein the first conductivelayer and the second conductive layer comprise at least one metalelement selected from the group consisting of Ta, W, Ti, Mo, Al and Cu.8. The display device according to claim 7, wherein the display deviceis a liquid crystal device.
 9. The display device according to claim 7,wherein the gate electrode is located over the semiconductor layer. 10.The display device according to claim 7, wherein the semiconductor layercomprises crystalline silicon.
 11. The display device according to claim7, further comprising a pixel electrode over the insulating film,wherein the pixel electrode is electrically connected to the other ofthe source region and the drain region of the transistor.
 12. Thedisplay device according to claim 7, further comprising a red colorfilter overlapped with the semiconductor layer.
 13. A display devicecomprising: a source wiring, wherein the source wiring includes a firstconductive layer, a transistor including a gate electrode and asemiconductor layer, wherein the gate electrode includes a secondconductive layer; an insulating film formed over the first conductivelayer and the second conductive layer, wherein the insulating film is incontact with an upper surface of the first conductive layer and an uppersurface of the second conductive layer, a gate wiring formed over theinsulating film, wherein the gate wiring is connected with the gateelectrode; and a third conductive layer over the insulating film,wherein one of a source region and a drain region of the transistor iselectrically connected to the first conductive layer through the thirdconductive layer, wherein the first conductive layer and the secondconductive layer comprise at least one metal element selected from thegroup consisting of Ta, W, Ti, Mo, Al and Cu.
 14. The display deviceaccording to claim 13, wherein the display device is a liquid crystaldevice.
 15. The display device according to claim 13, wherein the gateelectrode is located over the semiconductor layer.
 16. The displaydevice according to claim 13, wherein the semiconductor layer comprisescrystalline silicon.
 17. The display device according to claim 13,further comprising a pixel electrode over the insulating film, whereinthe pixel electrode is electrically connected to the other of the sourceregion and the drain region of the transistor.
 18. The display deviceaccording to claim 13, further comprising a red color filter overlappedwith the semiconductor layer.
 19. The display device according to claim13, wherein the gate wiring and the third conductive layer are formed byetching a same conductive layer.
 20. The display device according toclaim 13, further comprising a capacitor wiring over the insulatingfilm, wherein the capacitor wiring extends in parallel with the gatewiring.
 21. The display device according to claim 17, wherein the pixelelectrode is in contact with the insulating film.